Equilibar Electronic Vacuum Regulator
Electronic vacuum regulator
Vacuum control is performed by command signals from a computer. The command signals are first sent to a small electronic regulator, from which a pilot signal is generated and sent to the reference port of the dome-shaped Equilibar vacuum regulator (EVR) to control the process pressure. Equilibar offers a series of high-precision electronic pressure regulators that provide this pilot reference signal. The QPV ultra-high resolution model and the EPR-30Hg model allow for precise adjustments due to their minimal hysteresis and deadband. These regulators can be used in open-loop mode or closed-loop mode. In open-loop mode, the vacuum setpoint is sent to the electronic pilot regulator by the computer signal, and the pilot regulator supplies the commanded pressure to the EVR reference port, maintaining the process vacuum very close to the setpoint. In open-loop mode, slight variations in vacuum pressure occur as the flow rate increases.
- Company：日本スターテクノ
- Price：Other
